We decided to take a closer look at the most popular soviet processor KR580VM80A (first shoot), so that group of enthusiasts (russian only) would be able to recover schematic from it's layout.
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A bit more dirt, but less overetch:
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Dark field - metal is clearly visible:
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Polarized light - metal and vias are visible:
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After metallization etch. Any ideas why polysilicon gone?
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A bit more dirt, but less overetch:

Dark field - metal is clearly visible:

Polarized light - metal and vias are visible:

After metallization etch. Any ideas why polysilicon gone?
